CO2 Laser irradiation of GeO2 planar waveguide fabricated by rf-sputtering
نویسندگان
چکیده
منابع مشابه
Optical waveguide filter fabricated by excimer laser irradiation
Ge-SiO2 thin films highly photosensitive to excimer laser light were deposited by plasma enhanced chemical vapor deposition. In this paper, the following two studies are reported: (1) Direct writing of the channel waveguide was successfully confirmed only by irradiation with excimer laser through a Cr mask pattern, which was previously coated on the slab waveguide by sputtering method. Bragg gr...
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ژورنال
عنوان ژورنال: IOP Conference Series: Materials Science and Engineering
سال: 2015
ISSN: 1757-899X
DOI: 10.1088/1757-899x/73/1/012006